Design of a Single-Sided, Coreless, Flat-Type Linear Voice Coil Motor

A voice coil motor is a type of permanent magnet linear motor, which based on the Ampere force theorem. It has following advantages: simple structure, small size, no cogging force, and fast response time. In this study, was designed to provide x-directional thrust in magnetically levitated cable table lithography machine. The study Halbach array, adopted single-sided, coreless, flat-type structure. First, magnetic field distribution analyzed charge method obtain an expression for thrust. results analysis agreed very well with finite element simulation results. Next, main parameters including number turns made by coil, size wire, magnets, were selected optimized increase density. Finally, two double-layer, serpentine waterway water-cooling plate configurations motor. validity structure verified different winding equivalent models. This provided feasibility further upgrade windings’ current